During this paper, The brand new lapping slurry and sharpening slurry are released. And the deliquescence diploma of CLBO is fallen to least expensive. A new Doing work technology can also be adopted. Immediately after tough sharpening, the concentration of ultra-precision polishing slurry is improved appropriately. So does the ultra-precision sprucing pace, along with the wiping speed is faster as opposed to deliquescence pace. The CLBO crystal floor roughness can realize 1nm and continue to keep the area good quality nicely. Accessibility through your institution
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We summarized The existing progress position from the higher-power DUV laser both of those at the wavelength of FHG of your 1-μm laser and at 193 nm. The the latest growth from the stable-state/fiber laser, together with the nonlinear optical crystals, prompts not only the normal power but in addition the beam quality (coherence) in the DUV lasers to an unparalleled degree.
The standard electric power on the NIR laser continue to has the prospective to become enhanced to tens of watts like 70 W [26] Should the double-move configuration could possibly be utilized for that Yb:YAG SCF amplifier stage. Hence, Should the conversion performance of 31% from NIR to DUV can be even now maintained at this increased power problem, the standard output energy on the DUV laser at 258 nm could be over twenty W, which would become a exceptional electricity stage for your DUV laser and bring on the unanticipated DUV laser machining results. Furthermore, for prime-electricity DUV laser, the UV problems in the nonlinear crystal, such as the Home windows for CLBO crystal as well as mirrors, is yet another significant parameter for lasting and steady operation.
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On one other facet, the ability scaling in the NIR laser is an additional factor to raise the typical power with the 193-nm DUV laser. Due to insufficient the high-electric power amplification Remedy of your NIR laser (by way of example at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) could possibly be placed on make a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength as well as acquiring relative higher electricity [21]. Lately, a diamond Raman laser confirmed its means in attaining a superior ability along with a higher conversion efficiency within the 1st Stokes from the 1-μm laser [22,23], which implies the possibility to be applied within the 193-nm DUV laser generation because of its high Raman gain and enormous frequency change.
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The beam profile shown in Determine 7b shown a very good beam quality as among the merits of Raman laser, which would be advantageous to produce a 193-nm DUV laser with a top quality beam.
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The development with the 193-nm laser was demonstrated by phases of SFG. To be able to scale the DUV laser ability efficiently, a new principle of the 193-nm DUV laser era is offered based on the diamond Raman laser.